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1 — Specification for Cluster Tool Module Interface 300 mm: Mechanical Interface and Wafer Transport
装置設計に適用される静電気の制御方法は半導体製造施設内の静電気に関連するすべての問題を解決するものではない。施設内の製品またはレチクルの輸送時には静電気の影響を受け，静電気問題の原因となる。製造設備内で動き回る人も静電気の発生源となる。これらの設備の問題は本文書で述べている。
This Test Method yields the results of actual output flow versus MFC set point and indicated flow as influenced by steady state inlet pressure
SEMI C27-0118 (technical revision)
E03200 - SEMI E32 - 材料搬送管理スタンダード（MMM） StdPbc-1123 1 — Specification for ClusterNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
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